Your selections:
Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing
- Rakotondrabe, Micky, Fowler, Anthony G., Moheimani, S. O. Reza
Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation
- Fowler, Anthony G., Rakotondrabe, Micky, Moheimani, S. O. Reza
Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing
- Rakotondrabe, Micky, Fowler, Anthony G., Moheimani, S. O. Reza
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